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发明公开
CN104714374A 辐射系统和光刻设备 无效 - 驳回 复审申请

辐射系统和光刻设备
摘要：
一种辐射系统，配置成产生辐射束。所述辐射系统包括：辐射源(50)，配置成产生发射辐射和碎片的等离子体；辐射收集器(70)，配置成引导所收集的辐射至辐射束发射孔(60)。磁场产生装置(200)配置成产生具有磁场强度梯度的磁场，以将等离子体引导离开辐射收集器(70)。
摘要（英）：

A radiation system is configured to generate a radiation beam. The radiation system includes a radiation source (50) configured to generate a plasma that emits radiation and debris, and a radiation collector (70) configured to direct collected radiation to a radiation beam emission aperture (60). A magnetic field generator (200) is configured to generate a magnetic field with a gradient in magnetic field strength to direct the plasma away from the radiation collector (70).

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