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CN104733348A 检测系统及检测方法 无效 - 撤回

检测系统及检测方法
摘要：
本发明提供一种检测系统及检测方法，能够以低成本切实地检测出基板的偏心状态。具体而言，如下构成检测系统，使其具备：旋转部，使载放有圆形基板的载放台绕转轴旋转；及检测部，在距转轴的距离不同的多个检测位置分别检测出有无旋转中的基板的外周部。并如下构成检测系统，使其具备判定部，根据将外周部的有无发生更替时的载放台的相位与检测位置组合后的检测信息，来判定基板的偏心状态。
摘要（英）：

A detection system includes: a rotator that causes a mounting base where a circular substrate is to be mounted to rotate around a rotation axis; a detector that detects presence or absence of an outer peripheral portion of the rotating substrate at a plurality of respective detecting positions having different distances from the rotation axis; and a determiner that determines an eccentric state of the substrate based on detection information, the detection information being a combination of a phase of the mounting base when the presence or absence of the outer peripheral portion is switched and the detecting positions.

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