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发明授权
CN104752302B 一种基座支撑结构以及腔室 有权

一种基座支撑结构以及腔室
摘要：
本发明提供一种基座支撑结构，用于支撑腔室中的基座，所述基座支撑结构包括底座、升降杆、轴承部件，所述底座包括上部和形成在所述上部下端面的下部，所述底座的上部的外边缘延伸超过所述底座的下部的外边缘，所述轴承部件和所述底座的下部连接，所述升降杆穿过所述轴承部件和所述底座，以和所述基座相连。相应地，本发明还提供一种腔室。本发明能够更好地保证轴承部件与底座之间的同轴度，同时，与现有技术相比，本发明中基座支撑结构的安装更加便捷，并且，本发明仅需在腔室底壁上加工一个固定孔而无需加工螺纹孔。
摘要（英）：

The invention provides a base supporting structure applied to a base in a supporting cavity. The base supporting structure comprises a base, a lifting rod and a bearing part, wherein the base comprises an upper part, and a lower part formed on the lower end surface of the upper part; the outer side edge of the upper part of the base extends beyond the outer side edge of the lower part of the base; the bearing part is connected with the lower part of the base; the lifting rod passes through the bearing part and the base to be connected with the base. The invention further provides a cavity. With the adoption of the base supporting structure and the cavity, the coaxiality between the bearing part and the base can be ensured well; meanwhile, compared with the prior art, the base supporting structure can be conveniently mounted; in addition, a fixing hole, instead of a threaded hole is processed in the bottom wall of the cavity.

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