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发明公开
CN104867853A FOUP结构和FOUP清洁方法 无效 - 撤回

FOUP结构和FOUP清洁方法
摘要：
本发明公开了一种FOUP结构和FOUP清洁方法，通过在FOUP两侧侧板的内侧设置一根进气管和一根出气管，形成气体的单向流动通道，且进气管和出气管自上而下开设多个进气口和出气口，使得气流可以均匀分布于纵向空间，同时吹扫到FOUP上部和下部的晶圆，且气流相较现有技术更加平稳、均匀，提高了FOUP内晶圆的清洁均匀性和清洁效率、清洁效果。
摘要（英）：

The invention discloses a front-opening-unified-pod (FOUP) structure and an FOUP cleaning method. An air inlet pipe and an air outlet pipe are arranged at inner sides of side plates at two sides an FOUP unit to form a unidirectional air flowing channel; and a plurality of air inlets and air outlets are formed in the air inlet pipe and the air outlet pipe from top to bottom. Therefore, the airflow can be distributed in the longitudinal space uniformly and wafers at the top and bottom of the FOUP unit can be blown; and compared with the prior art, the airflow is stable and uniform. The clean uniformity, the cleaning efficiency, and the cleaning effect of wafers in the FOUP unit can be improved.

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