A method of fabricating miniature ultrasound transducers includes receiving a wafer on which a plurality of miniature ultrasound transducers is formed. The miniature ultrasound transducers each includes: a transducer membrane that contains a piezoelectric material and a first bond pad and a second bond pad each electrically coupled to the transducer membrane. A protective layer is conformally deposited over the plurality of miniature ultrasound transducers from a front side of the wafer. A first etching process is performed to form a plurality of first trenches that extend into the wafer from the front side. The first trenches are etched through the protective layer. The first trenches are disposed between adjacent miniature ultrasound transducers. A second etching process is performed to remove portions of the protective layer disposed over the first and second bond pads, thereby exposing the first and second bond pads.