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发明授权
CN105607667B 减压阀及气体供给装置 有权

减压阀及气体供给装置
摘要：
本发明提供一种减压阀及气体供给装置，能够减少从二次侧流路传来的反射波引起的噪音。对从一次侧流路向二次侧流路供给的气体进行减压的减压阀具备：筒状部，呈筒状，并具有与一次侧流路连通的导入口和与二次侧流路连通的导出口；活塞，嵌入筒状部的内侧，构成为能够在筒状部的内侧沿着筒状部的轴向滑动，并在筒状部的内侧划定与导入口及导出口连通的空间；及弹簧，对活塞朝向空间施力，在从轴向观察的情况下，导出口处于从活塞的中心向一方偏离的位置，弹簧对活塞施力的作用力从活塞的所述中心偏向导出口一侧地分布。
摘要（英）：

The pressure reduction valve includes: a cylindrical portion, a piston and a spring. The cylindrical portion includes an inlet communicating with the primary side flow path and an outlet communicating with the secondary side flow path. The piston fitted into the cylindrical portion is slidable along an axis direction of the cylindrical portion within the cylindrical portion, and defines, within the cylindrical portion, a space communicating with the inlet and the outlet. The spring applies, to the piston, a force acting toward the space. The outlet is displaced in one direction from the center of the piston when seen in the axis direction. The force applied to the piston by the spring is distributed so as to deviate from the center of the piston to the side of the outlet.

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