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发明授权
CN105742215B 炉管、晶片冷却方法以及自动晶舟清洁方法 有权

炉管、晶片冷却方法以及自动晶舟清洁方法
摘要：
本发明提供了一种炉管、晶片冷却方法以及自动晶舟清洁方法。所述炉管包括：炉管反应腔、以及布置在炉管反应腔的用于晶舟出入的出入口处的吹风散热装置；其中吹风散热装置包括环形微孔管和布置在环形微孔管上的朝内喷射气体和/或液体的多个石英喷嘴；其中，晶舟穿过环形微孔管和所述出入口进入炉管反应腔内部。
摘要（英）：

The invention provides a furnace tube, a wafer cooling method and an automatic crystal boat cleaning method. The furnace tube comprises a furnace tube reaction cavity and a blowing radiator, wherein the blowing radiator is arranged at an opening, for a crystal boat to come in and go out, of the furnace tube reaction cavity; the blowing radiator comprises an annular micropore tube and a plurality of quartz nozzles; the quartz nozzles are arranged on the annular micropore tube for spraying a gas and/or liquid inwards; and the crystal boat passes through the annular micropore tube and the opening and enters the inside of the furnace tube reaction cavity.

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