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发明公开
CN105821376A 一种铜锌锡硫靶材的制备方法 审中-实审

一种铜锌锡硫靶材的制备方法
摘要：
本发明制备一种铜锌锡硫薄膜太阳电池吸收层靶材，其特征在于，所述靶材中Cu：Zn：Sn：S的摩尔配比为2：1：1：4，其中，所述靶材为Cu2ZnSnS4相。本发明还提供所述靶材的制备方法，以及所述靶材在制备薄膜太阳电池吸收层中的应用，通过磁控溅射可直接制备得到Cu2ZnSnS4薄膜。本发明工艺简单、成本低、制成的靶材组分均匀、致密性好，为磁控溅射制备Cu2ZnSnS4薄膜太阳电池吸收层奠定基础。
摘要（英）：

The invention provides a preparation method for a copper-zinc-tin sulfide target for an absorbing layer of a thin film solar cell. The copper-zinc-tin sulfide target is characterized in that a mol ratio of Cu to Zn to Sn to S in the target is 2: 1: 1: 4 and the target is of a Cu2ZnSnS4 phase. The invention also provides the preparation method for the copper-zinc-tin sulfide target and application of the target in preparation of the absorbing layer of the thin film solar cell. A Cu2ZnSnS4 film can be directly prepared through magnetron sputtering. The method is simple in process and low in cost; and the prepared target has the advantages of uniform composition and good compactness and lays a foundation for preparation of the absorbing layer of the Cu2ZnSnS4 thin film solar cell through magnetron sputtering.

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