The invention provides a capacitive accelerometer with overload limit device. The accelerometer comprises a wafer silicon substrate, a mass block and at least one overload limit device, each overload limit device is composed of a limiting baffle plate and a second connecting piece, one end of the limiting baffle plate is connected with the wafer silicon substrate, the other end of the limiting baffle plate is free, one end of the second connecting piece is connected with the wafer silicon substrate, and the other end of the second connecting piece is connected with the mass block. The invention also provides a manufacturing method of the capacitive accelerometer. The thickness and limiting distance of the limiting baffle plate are decided by the etching depth of an etching technology, the processing consistence of the whole wafer is high, a mechanical limiting structure is used to omit a complex control IC of an electrical limiting structure, accuracy of overload limit protection is ensured, and a product can be miniaturized.