Provided is a lamp-heating substrate temperature control system, which mainly solves the problem that an existing temperature control system cannot control the surface temperature of a substrate. The invention provides the lamp-heating substrate temperature control system, which comprises a lamp tube, a substrate support and a power controller. The lamp-heating substrate temperature control system can control substrate temperature rise conditions of the substrate in the technical reaction process well, and can realize continuous production of products, and thus equipment productivity is greatly improved; and the system is unique in concept and is simple and practicable, is suitable for low-temperature process of a semiconductor device, and has a good popularization prospect.