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发明公开
CN106676484A 一种铬管靶材的绑定方法 无效 - 驳回

一种铬管靶材的绑定方法
摘要：
本发明提供了一种磁控溅射镀膜用铬管靶材的绑定方法。该方法包括在铬管靶材的背管外表面采用电镀工艺制备金属涂层作为绑定层；利用热等静压工艺使铬管靶材层通过绑定层与背管达到冶金结合，实现铬管靶材的绑定。本发明所述的铬管靶材的绑定方法可以使铬管靶材层通过绑定层与背管实现冶金结合，把铬管靶材层在溅射镀膜过程中产生的热量及时传递到背管内冷却，防止铬管靶材层出现开裂，保证溅射镀膜顺利进行。
摘要（英）：

The invention provides a binding method of a chrome pipe target material. The method comprises the following steps of manufacturing a metal coating on the outer surface of a back pipe of the chrome pipe target material as a binding layer by adopting an electroplating technology; and enabling the chrome pipe target material layer and the back pipe to be in metallurgical combination by the binding layer by utilizing a hot isostatic pressing technology to realize the binding of the chrome pipe target material. According to the binding method of the chrome pipe target material disclosed by the invention, the chrome pipe target material layer and the back pipe can be in metallurgical combination by the binding layer, so that the heat quantity generated by the chrome pipe target material layer in the process of sputtering coating is transmitted into the back pipe for cooling in time, so that the chrome pipe target material layer is prevented from cracking, and the condition that sputter coating is smoothly processed is guaranteed.

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