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发明公开
CN106950805A 对位装置及方法 有权

对位装置及方法
摘要：
本公开是关于一种对位装置及方法，用于实现基板和掩膜版的对位；该对位装置包括：第一闭合线圈，设置于所述基板的第一对位区域中；第一磁极以及第二磁极，位于所述掩膜版的第一预设区域的两侧并生成第一磁场；其中，所述第一磁极以及所述第二磁极均与所述第一预设区域有间隙；第一电流传感器，与所述第一闭合线圈连接。该对位装置可以提高对位精度。
摘要（英）：

The invention discloses an alignment device and method for aligning a substrate with a mask plat. The alignment device comprises a first closed coil, a first magnetic pole and a second magnetic pole, and a first current sensor, wherein the first closed coil is arranged in a first alignment region of the substrate; the first magnetic pole and the second magnetic pole are placed on two sides of a first predetermined region of the mask plate and generate a first magnetic field; gaps exist between both the first magnetic pole and the first predetermined region and between the second magnetic pole and the first predetermined region; and the first current sensor is connected to the first closed coil. The alignment device can improve the alignment precision.

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