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发明公开
CN107251341A 激光系统和激光退火装置 无效 - 撤回

激光系统和激光退火装置
摘要：
一种激光系统，其是作为对被加工物照射脉冲激光的激光退火装置的光源的激光系统，该激光系统可以具备：生成脉冲激光的激光装置；能够改变脉冲激光的脉冲时间波形的脉冲时间波形可变装置；以及从激光退火装置接收脉冲时间波形生成参数，对脉冲时间波形可变装置进行控制的控制部。
摘要（英）：

This laser system is a light source for a laser annealing device that applies pulsed laser light to a subject to be processed. The laser system may be provided with: a laser device that generates the pulsed laser light; a pulse time waveform variable device that varies the pulse time waveform of the pulsed laser light; and a control unit, which receives pulse time waveform generation parameters from the laser annealing device, and controls the pulse time waveform variable device.

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