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发明公开
CN107365977A 用于提供均匀气流的设备与方法 有权

用于提供均匀气流的设备与方法
摘要：
本发明涉及用于提供均匀气流的设备与方法。提供了一种具有输送通道的气体分配设备，其中输送通道具有一入口端、一出口端与沿着长度而分隔开的多个孔隙。入口端系可连接至一惰性气体源，且出口端系可连接于一真空源。同时提供了一种具有螺旋输送通道、互相缠绕的螺旋输送通道、分流的输送通道、汇合的输送通道、以及成形的输送通道的气体分配设备，其中入口端与出口端系配置以使气体在输送通道内快速交换。
摘要（英）：

The invention relates to an apparatus and method for providing uniform flow of gas. Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The inlet end is connectable to an inlet gas source and the outlet end is connectible with a vacuum source. Also provided are gas distribution apparatus with spiral delivery channels, intertwined spiral delivery channels, splitting delivery channels, merging delivery channels and shaped delivery channels in which an inlet end and outlet end are configured for rapid exchange of gas within the delivery channels.

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