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发明授权
CN107617971B 研磨垫及研磨设备和方法 有权 转让

研磨垫及研磨设备和方法
摘要：
本公开涉及一种研磨垫再生方法以及一种研磨设备。该方法包括将研磨垫生成材料的流体供应至研磨台的供应步骤；以及使研磨垫生成材料固化以形成研磨垫的固化步骤，其中，供应步骤和固化步骤被选择性地执行以补偿研磨垫在工作中的磨损。该设备包括：研磨台；研磨头，其承载有待研磨的制品；以及研磨垫，设置于研磨台的表面，其中研磨垫被构造成能够通过将研磨垫生成材料的流体供应至研磨台以及使研磨垫生成材料固化来再生，从而补偿研磨垫在工作中的磨损。
摘要（英）：

The invention relates to a grinding pad regenerating method and grinding equipment. The grinding pad regenerating method comprises the supply step that a fluid of a grinding pad generating material issupplied to a grinding table and the solidifying step that the grinding pad generating material is solidified so as to form a grinding pad, wherein the supply step and the solidifying step are selectively executed so as to compensate abrasion of the grinding pad in working. The grinding equipment comprises the grinding table, a grinding head borne with a to-be-ground product, and the grinding padarranged on the surface of the grinding table, wherein the grinding pad can be regenerated through the steps that the fluid of the grinding pad generating material is supplied to the grinding table,and the grinding pad generating material is solidified, and accordingly abrasion of the grinding pad in working is compensated.

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