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发明公开
CN107866691A 具备机械振动抑制功能的驱动装置以及系统 有权

具备机械振动抑制功能的驱动装置以及系统
摘要：
本发明提供一种具备机械振动抑制功能的驱动装置以及系统，其不需要复杂的同步指令，能够抑制伴随机械的动作而产生的振动。驱动装置具备：减振器侧线性电动机、驱动侧线性电动机、检测驱动侧线性电动机的可动部相对于机械基座的位置即第一位置的第一检测单元、检测减振器侧线性电动机的可动部相对于机械基座的位置即第二位置的第二检测单元、检测驱动侧线性电动机的可动部相对于减振器侧线性电动机的可动部的位置即第三位置的第三检测单元、基于第一位置和第三位置进行驱动侧线性电动机的控制的驱动侧控制单元、通过基于第二位置进行减振器侧线性电动机的控制来使减振器侧线性电动机作为减振器发挥功能的减振器侧控制单元。
摘要（英）：

The invention provides a drive apparatus comprising mechanical vibration suppression function, and a system comprising mechanical vibration suppression function. No complex synchronous instruction isneeded to suppress vibration caused by action of machines. An apparatus comprises a damper side linear motor; a drive side linear motor; a first detection unit that detects a first position that is aposition of a movable portion of the drive side linear motor in relation to a machine base; a second detection unit that detects a second position that is a position of a movable portion of the damperside linear motor in relation to the machine base; a third detection unit that detects a third position that is a position of the movable portion of the drive side linear motor in relation to the movable portion of the damper side linear motor; a drive side control unit that controls the drive side linear motor, based on the first position and the third position; and a damper side control unit that controls the damper side linear motor, based on the second position, so that the damper side linear motor serves as a damper.

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