The processing device pertaining to an embodiment of the present invention is provided with an object arrangement unit, a generation source arrangement unit, and a collimator. An object is arranged inthe object arrangement unit. The generation source arrangement unit is arranged in a position separated from the object arrangement unit, and a particle generation source capable of releasing particles toward the object is arranged therein. The collimator is arranged between the object arrangement unit and the generation source arrangement unit and has a plurality of walls, and is provided with aplurality of penetrating openings formed by the plurality of walls. The plurality of walls have first inner surfaces facing the penetrating openings. The first inner surfaces have a first portion created from a first material capable of releasing the particles, and a second portion which is aligned with the first portion in a first direction, is closer to the object arrangement unit than the first portion, and is created from a second material.