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发明公开
CN108170103A 一种集成电路生产线设备常量监控的方法 无效 - 驳回

一种集成电路生产线设备常量监控的方法
摘要：
本发明涉及一种集成电路生产线上设备常量监控的方法，配置设备常量数据文件，形成设备常量数据配置文件；获取设备常量数据配置文件的路径，并判断按照路径是否能读取设备常量数据配置文件，读取设备常量数据配置文件的设备常量信息，存放入内存中；根据设备常量信息内容对应读取实时的设备常量信息，并将实时的设备常量数据值与设备常量数据配置文件的设备常量信息对比，进行检查和校验，存储至服务器。本发明方法利用设备常量配置文件，从设备中实时读取对应的设备常量数据值，对读取的设备常量数据值进行范围校验，能够实现实时监控设备常量数据值是否出现异常的问题、具有很强的实时性和扩展性等特点。
摘要（英）：

The invention relates to an integrated circuit production line equipment constant monitoring method. An equipment constant data file is configured, and the equipment constant data configuration file is formed; a path of the equipment constant data configuration file is acquired, whether the equipment constant data configuration file can be read according to the path is determined, and the equipment constant information of the equipment constant data configuration file is read and is stored in a memory; the real-time equipment constant information is correspondingly read according to the equipment constant information content, real-time equipment constant data is compared with the equipment constant information of the equipment constant data configuration file, inspection and verification are carried out, and the information is stored to a server. The method is advantaged in that equipment constants are utilized for file configuration, the corresponding equipment constant data is read from equipment in real time, scope verification of the read equipment constant data is carried out, whether the equipment constant data is abnormal can be monitored in real time, and strong practicality and expansibility are realized.

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