利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN108395450A 用于沉积含硅膜的有机氨基官能化线性和环状低聚硅氧烷 有权

用于沉积含硅膜的有机氨基官能化线性和环状低聚硅氧烷
摘要：
本文公开了具有至少两个硅原子和两个氧原子以及有机氨基基团的氨基官能化线性和环状低聚硅氧烷以及用于制备所述低聚硅氧烷的方法。本文还公开了使用所述有机氨基官能化线性和环状低聚硅氧烷沉积含硅和氧的膜的方法。
摘要（英）：

Amino-functionalized linear and cyclic oligosiloxanes, which have at least two silicon and two oxygen atoms as well as an organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized linear and cyclic oligosiloxanes are also disclosed.

公开/授权文献
0/0