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发明公开
CN108486530A 在线加热实现玻璃Be2Ti3薄膜p-n型转变的方法 无效 - 驳回

在线加热实现玻璃Be2Ti3薄膜p-n型转变的方法
摘要：
本发明公开在线加热实现玻璃Be2Ti3薄膜p-n型转变的方法，包括以下操作步骤，首先硅玻璃基片进行预处理，经干燥处理后，将硅玻璃基片置于磁控溅射基片台，进行溅射处理，即实现将玻璃Be2Ti3薄膜p-n型转变，在线加热的方式，采用磁控溅射技术，在对在镀膜的同时进行在线加热，工艺比较严苛，本方案再加入加热模块后可以实现在线加热镀膜。可以对于Be2Ti3的晶粒的生长，对于真空条件下降温保护去应力，便于薄膜和基板之间进行结合。
摘要（英）：

The invention discloses a method for achieving p-n transformation of a glass Be2Ti3 film based on online heating. The method comprises the following steps that a silica glass substrate is pretreated firstly; and after being dried, the silica glass substrate is placed on a magnetron sputtering substrate table for sputtering treatment, and thus, p-n transformation of the glass Be2Ti3 film is achieved. An online heating mode and the magnetron sputtering technique are adopted, online heating is conducted during film coating, and the process is strict; and online heating for film coating can be achieved by additionally adopting a heating module. Growth of Be2Ti3 grains can be facilitated, cooling production is conducted under the vacuum condition to release stress, and thus the film and the substrate can be bonded conveniently.

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