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CN109036765A 一种形成集成磁性器件的磁芯的方法 无效 - 驳回

一种形成集成磁性器件的磁芯的方法
摘要：
本申请公开了一种形成集成磁性器件的磁芯的方法。集成磁性器件(100)具有磁芯(120)，磁芯(120)包括定位于介电层(106)中的沟槽(108)中的磁性材料层。磁性材料层是平坦的并且平行于沟槽(108)的底部(112)，并且不沿沟槽(108)的侧面(114)向上延伸。通过在介电层(106)上方形成磁性材料层并延伸到沟槽(108)中来形成集成磁性器件(100)。在磁性材料层上方形成保护层。从介电层(106)上方移除磁性材料层，在沟槽(108)中留下磁性材料层和一部分保护层。随后移除沿着沟槽(108)的侧面(114)的磁性材料层。沿着沟槽(108)的底部(112)的磁性材料层提供磁芯(120)。
摘要（英）：

The invention discloses a method to form a magnetic core for integrated magnetic devices. An integrated magnetic device (100) has a magnetic core (120) which includes layers of the magnetic material located in a trench (108) in a dielectric layer (106). The magnetic material layers are flat and parallel to a bottom (112) of the trench (108), and do not extend upward along sides (114) of the trench(108). The integrated magnetic device (100) is formed by forming layers of the magnetic material over the dielectric layer (106) and extending into the trench (108). A protective layer is formed overthe magnetic material layers. The magnetic material layers are removed from over the dielectric layer (106), leaving the magnetic material layers and a portion of the protective layer in the trench (108). The magnetic material layers along sides (114) of the trench (108) are subsequently removed. The magnetic material layers along the bottom (112) of the trench (108) provide the magnetic core (120).

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