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发明公开
CN109100920A 曝光装置以及物品的制造方法 有权

曝光装置以及物品的制造方法
摘要：
本发明涉及曝光装置及物品的制造方法。提供曝光装置，具有：载置台，保持基板使该基板移动；控制部，控制载置台；第1测量部，在被载置台保持的基板的拍摄区域到达对拍摄区域曝光的曝光区域之前测量拍摄区域的高度方向的位置；第2测量部，先于第1测量部而测量拍摄区域的高度方向的位置，控制部通过用于根据由第2测量部测量拍摄区域的高度方向的位置而得的第1测量值来使基板在高度方向上移动的第1驱动、用于根据接着第1驱动而由第1测量部测量拍摄区域的高度方向的位置而得的第2测量值和第1测量值来使基板在高度方向上移动的第2驱动控制载置台，以使在拍摄区域到达曝光区域之前使被载置台保持的基板的高度方向的位置成为最终目标位置。
摘要（英）：

The invention relates to an exposure apparatus and a method of manufacturing an article. Provided is an exposure apparatus comprising: a stage that holds a substrate to move the substrate; a control unit that controls the stage; a first measurement unit that measures a position of a shot area in a height direction before the shot area of the substrate held by the stage reaches an exposure area inwhich exposure for the shot area is performed; and a second measurement unit that measures a position of the shot area in the height direction prior to the first measurement unit, wherein, the controlunit controls the stage by a first drive moving the substrate in the height direction based on a first measured value obtained by measuring the position of the shot area in the height direction by the second measurement unit and a second drive moving the substrate in the height direction based on a second measured value and the first measured value obtained by measuring the position of the shot area in the height direction by the first measurement unit following the first drive, such that the position of the substrate held by the stage in the height direction becomes the final target positionbefore the shot area reaches the exposure area.

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