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发明公开
CN110277335A 一种用于石英晶片排片机的工装 有权

一种用于石英晶片排片机的工装
摘要：
本发明公开一种用于石英晶片排片机的工装，包括托盘以及载盘，所述托盘包括上层盘和下层盘，所述下层盘呈矩形，设有2个直径相同的大圆孔，所述上层盘两侧边与所述大圆孔的一段圆弧相适配，所述下层盘还设有7根圆柱，所述圆柱位置所形成的空间与所述上层盘相适配；所述载盘整体形状与上层盘相同，所述圆柱位置所形成的空间与所述载盘相适配，所述圆柱高度不小于上层盘厚度与载盘厚度之和，所述载盘设置有若干个晶片放置槽，载盘还设置有2个小圆孔以及2个凸起。本发明的目的是旨在提供一种直接放置于排片机设备内部，能解决解决晶片散乱排布可能出现的问题并且在设备内部提供定位功能的工装。
摘要（英）：

The invention discloses a tool for a quartz wafer arranging machine. The tool comprises a tray and a carrier tray. The tray comprises an upper tray and a lower tray. The lower tray is rectangular and provided with two large circular holes with the same diameter. The two sides of the upper tray are adaptive to a section of circular arc of the large circular holes. The lower tray is further provided with seven cylinders, and the space formed by the cylinder position is adaptive to the upper tray. The overall shape of the carrier tray is the same as that of the upper tray. The space formed by the cylinder position is adaptive to the carrier tray. The cylinder height is not less than the sum of the thickness of the upper tray and the thickness of the carrier tray. The carrier tray is provided with multiple wafer placing grooves. The carrier tray is further provided with two small circular holes and two protrusions. The objective of the present invention is to provide the tool which is placed directly inside the wafer arranging machine and can solve problems that may occur in the scattered arrangement of wafers and provide the positioning function inside the equipment.

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