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发明公开
CN110695005A 用于电子元器件的激光清洗设备及方法 有权 转让

用于电子元器件的激光清洗设备及方法
摘要：
本发明公开一种用于电子元器件的激光清洗设备，该用于电子元器件的激光清洗设备包括机座、可移动地设置在所述机座上的加工台、设置在所述加工台上方的激光清洗头和用于产生激光束的激光发生器，所述激光清洗设备还包括设置在所述激光束的传输光路上的第一光束整形单元和第二光束整形单元，所述第一光束整形单元用于将激光发生器产生的激光束耦合进光纤，所述第二光束整形单元用于调节从所述激光清洗头发射出的聚焦光斑的形状和能量分布。本发明用于电子元器件的激光清洗设备可增强对于微电子器件的清洗效果，保证微电子器件的产品性能，同时提高清洗效率。此外，本发明还公开一种用于电子元器件的用于电子元器件的激光清洗方法。
摘要（英）：

The invention discloses a laser cleaning facility for electron components. The laser cleaning facility for the electron components comprises a machine base, a machining table movably arranged on the machine base, a laser cleaning head arranged above the machining table and a laser generator for generating laser beams. The laser cleaning facility further comprises a first light beam shaping unit and a second light beam shaping unit arranged on the laser beam transmission light path. The first light beam shaping unit is used for coupling the laser beams generated by the laser generator into optical fiber, and the second light beam shaping unit is used for adjusting the shape and energy distribution of focusing light spots emitted by the laser cleaning head. Through the laser cleaning facility for the electron components, the microelectronic device cleaning effect can be enhanced, the microelectronic device product performance is guaranteed, and meanwhile the cleaning efficiency is improved. In addition, the invention further discloses a laser cleaning method for the electron components.

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