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发明公开
CN110799907A 确定变形的方法 有权

确定变形的方法
摘要：
一种确定衬底变形的方法，具有以下步骤：(a)从多个衬底的测量结果获得(402)与标记位置相关联的第一测量数据(Xi)；(b)从所述多个衬底的测量结果获得(404)与标记位置相关联的第二测量数据(Xi和/或Y)；(c)确定(408)所述第一测量数据与第二测量数据之间的映射(Mi,j)；和(d)通过计算所述映射矩阵(Mij)的特征值分解来分解(410)所述映射以分离地确定在所述数据之间的所述映射中与第二变形(例如衬底变形)以不同比例缩放的第一变形(例如标记变形)。使用非线性优化可以一起执行确定映射的步骤和分解所述映射的步骤。
摘要（英）：

A method for determining substrate deformation has the steps: (a) obtaining (402) first measurement data (X i ) associated with mark position, from measurements of a plurality of substrates; (b) obtaining (404) second measurement data (X i and/or Y) associated with mark position, from measurements of the plurality of substrates; (c) determining (408) a mapping (M i,j ) between the first measurement data and the second measurement data; and (d) decomposing (410) the mapping, by calculating an eigenvalue decomposition for the mapping matrix (M ij ), to separately determine a first deformation (e.g. mark deformation) that scales differently from a second deformation (e.g. substrate deformation) in the mapping between the data. The steps of determining a mapping and decomposing the mapping maybe performed together using non-linear optimization.

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