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发明公开
CN110824683A 用于样本的多模式检查的系统和方法 有权

用于样本的多模式检查的系统和方法
摘要：
一种用于样本的多模式检查的系统和方法。所述系统包括：辐射源、物镜、明场检测模块、暗场检测模块、以及光学器件。当所述系统以第一模式操作时，所述光学器件被配置为引导输入束通过第一开口朝向所述物镜的第一区域，而基本上不阻挡所述输入束的任何部分。当所述系统在第二模式中操作时，所述光学器件被配置为引导所述输入束通过第二开口朝向所述物镜的第二区域，而基本上不阻挡所述输入束的任何部分。所述物镜的所述第一区域与所述物镜的所述第二区域不同。
摘要（英）：

A system and method for multiple mode inspection of a sample. The system includes a radiation source, an objective lens, a bright field detection module, a dark field detection module and optics. Theoptics, when the system operates at a first mode, is configured to direct the input beam through a first opening, without substantially blocking any part of the input beam, towards a first region of the objective lens. The optics, when the system operates at a second mode, is configured to direct the input beam through a second opening, without substantially blocking any part of the input beam, towards a second region of the objective lens. The first region of the objective lens differs from the second region of the objective lens.

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