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发明公开
CN110998801A 流体供给装置和流体供给方法 审中-实审 转让

流体供给装置和流体供给方法
摘要：
提供一种能够稳定地供给超临界流体的流体供给装置和流体供给方法。该流体供给装置是用于朝向处理室供给向超临界流体变化之前的液态的流体的流体供给装置，该流体供给装置具有：冷凝器(130)，其用于使气态的流体冷凝液化；贮存器(140)，其用于贮存利用冷凝器(130)冷凝液化而成的流体；泵(150)，其用于朝向处理室(500)加压输送被贮存于贮存器(140)的液化而成的流体；以及加热部件(20)，其设于与泵(150)的喷出侧连通的流路，用于使该流路内的液体部分地成为超临界流体。
摘要（英）：

[Problem] To provide a fluid supply device and a fluid supply method that make it possible to stably supply a supercritical fluid. [Solution] A fluid supply device that: supplies a fluid that is in a pre–supercritical fluid transformation liquid state toward a processing chamber; and has a condenser 130 that condenses and liquefies a gaseous fluid, a tank 140 that stores fluid that has been condensed and liquefied by the condenser 130, a pump 150 that pressure-feeds the liquefied fluid that is stored in the tank 140 toward the processing chamber 500, and a heating 20 means that is provided on a flow path that communicates with a discharge side of the pump 150, and is for turning a portion of fluid in the flow path into a supercritical fluid.

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