利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN111009485A 基板仓库、基板处理系统和基板检查方法 有权

基板仓库、基板处理系统和基板检查方法
摘要：
本发明提供一种基板仓库、基板处理系统和基板检查方法，不使生产量降低地确定出半导体器件制造时的不良原因。一种基板仓库，用于保管保存有基板的容器，所述基板仓库具备：搬入部，其用于在从外部搬入所述容器时载置该容器；搬出部，其用于在向外部搬出所述容器时载置该容器；等待部，其用于载置等待向外部搬出的所述容器；功能部，其包括检查部，所述检查部进行检查所述基板的处理；交接部，其用于在所述功能部与所述容器之间交接基板时载置该容器；容器搬送机构，其用于在该基板仓库内搬送所述容器；以及基板搬送机构，其用于在所述功能部与载置于所述交接部的所述容器之间搬送基板。
摘要（英）：

A substrate warehouse which stores a container housing a substrate, includes: a transfer-in part which allows the container to be mounted thereon when the container is transferred-in from an outside; a transfer-out part which allows the container to be mounted thereon when the container is transferred-out to the outside; a standby part which allows the container standing by for transfer-out to the outside to be mounted thereon; a functional part including an inspection part, the inspection part performing processing of inspecting the substrate; a delivery part which allows the container to be mounted thereon when delivering the substrate between the functional part and the container; a container transfer mechanism which transfers the container in the substrate warehouse; and a substrate transfer mechanism which transfers the substrate between the functional part and the container mounted on the delivery part.

公开/授权文献
0/0