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发明授权
CN1222011C 一种用于带电粒子束装置的物镜 失效 - 权利终止

一种用于带电粒子束装置的物镜
摘要：
本发明提供了一种用于带电粒子束装置的改进物镜。该物镜包括一个磁透镜，用于产生一个第一磁场将带电粒子束聚焦在样品上。而且，通过提供至少一个附加线圈配置，一个偏转装置被集成到磁透镜中，产生一个第二磁场用于使带电粒子束偏转。因此，第二磁场通过磁透镜的至少一个磁极条被控制，本发明也提供了用于带电粒子束装置的改进的圆柱腔，它包括改进的物镜。
摘要（英）：

The present invention provides an improved objective lens for a charged particle beam device. The objective lens comprises a magnetic lens that creates a first magnetic field for focussing the charged particle beam onto the specimen. Furthermore, a deflector is integrated into the magnetic lens by providing at least one additional coil arrangement that creates a second magnetic field used to deflect the charged particle beam. Thereby, the second magnetic field is guided through at least one of the pole pieces of the magnetic lens. The present invention also provides an improved column for a charged particle beam device including the improved objective lens.

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