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发明公开
CN1776526A 加温闪光两用纳米压印装置 失效 - 权利终止

加温闪光两用纳米压印装置
摘要：
加温闪光两用纳米压印装置，由双路CCD对准系统、Z向校正器、紫光照明系统、左右侧板、油压顶系统、承片加热台、倾斜校准机构和控制系统等组成，主机大底板位于电气控制系统的机台柜上，并安装了左右侧板和后板及上面安装了横板构成框架，在横板的下面悬挂有Z向校正机构和装有压模的倾斜校准机构，在主机大底板的中间正对压模的位置装了油压顶系统，使安于上面的XYθ微动工件台、承片加热台和基片上升压紧压模而压印出纳米图形结构，装于横板上的紫光照明系统可对压印层聚合物进行紫光照射使其固化，同时承片吸板可被加热升温和降温，使聚合物固化脱模，从而可实现闪光压印和加温大面积压印。本发明发挥出了两种压印方法的优点，以利于推广应用。
摘要（英）：

The stamping apparatus is composed of CCD alignment system in two way, corrector in Z direction, illumination system in purple light, left and right side plates, oil pressure lifting jack system, heating desk for loaded piece, slant correcting mechanism and control system. Large base plate of host is on equipment cabinet. The large base plate, left and right side plates, backboard and upper transverse plate constitute frame. Corrector in Z direction and slant correcting mechanism with press mold are hung underside of the transverse plate. Oil lifting jack system faced to the press mold is installed at middle. XYtheta micromotion work desk, the heating desk, substrate is lifted by jack system to impact the mold to stamp out Nano graph structure. Illumination system in purple light illumines polymer in stamping layer to solidify it. Heating up and cooling down heating desk solidifies and demoulds the polymer. The invention possesses advantages of two stamping methods.

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