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发明授权
CN1800434B 控制沉积系统的喷射器的方法 有权 转让

控制沉积系统的喷射器的方法
摘要：
本发明提供了一种用于控制喷射器的方法。在控制沉积系统中的包括熔罐、引导通路和喷射喷嘴的喷射器的方法中，加热引导通路和喷射喷嘴。在加热引导通路和喷射喷嘴后加热熔罐。此外，在冷却包括熔罐、引导通路和喷射喷嘴的喷射器中，冷却熔罐。在冷却熔罐后，冷却引导通路和喷射喷嘴。这种方法的优点在于通过防止由熔罐中蒸发的沉积材料导致喷射喷嘴形成阻塞或喷溅来提高形成在基底上的有机层的均匀性。
摘要（英）：

In a method of controlling an effusion cell in a deposition system, including a crucible, a guiding pathway and an injection nozzle, a guiding pathway and an injection nozzle are heated. The crucibleis heated after heating the guiding pathway and the injection nozzle. In addition, in cooling the effusion cell including a crucible, a guiding pathway and an injection nozzle, the crucible is cooled.The guiding pathway and the injection nozzle are cooled after cooling the crucible. This method has an advantage of enhancing uniformity of the organic layer formed on the substrate by preventing theclogging of the injection nozzle by deposition material vaporized in the crucible or splashing.

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