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发明授权
CN1800443B 基片固定盘及利用该基片固定盘的基片校正系统及其方法 有权 转让

基片固定盘及利用该基片固定盘的基片校正系统及其方法
摘要：
本发明提供一种基片固定盘，为了在真空工程用垂直基片固定盘的平板面上固定和支持所述基片，包含至少一部分以上基片固定单元，并且，通过固定和支持垂直布置的基片，可以进行高精度的校正和更加稳定的蒸镀工艺。基片固定盘(60)及利用该基片固定盘(60)的基片校正系统及其方法，包含被蒸镀蒸镀物的基片(10)、用于容纳所述基片(10)的框架(70)、用于容纳所述框架(70)而构成的盘(60)、用于在所述框架(70)上固定和支持所述基片(10)而构成的至少一个以上基片固定单元(110)。
摘要（英）：

To provide a holding tray for a substrate with which at least a part or more of a substrate holding means is contained so that the substrate is fixedly supported on the flat-plate surface of the vertical substrate holding tray for vacuum process, and the high accurate alignment can be obtained by holding and supporting the substrate arranged at the vertical-state and the stable vapor-deposition process is performed. The substrate fixing tray 60, the substrate alignment system utilizing this tray and this method, are combined of the substrate 10 vapor-depositing the vapor-deposition material, a frame 70 constituted so as to hold the substrates 10, the tray 60 constituted so as to hold the above frame 70 and the substrate holding means 110 constituting at least one or more so as to fixedly support the substrate 10 to the frame 70.

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