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CN1945443B 用平板显示器多辞典压缩方法的光刻设备和装置制造方法 有权

用平板显示器多辞典压缩方法的光刻设备和装置制造方法
摘要：
光刻设备包含调制辐射束的独立可控元件阵列、存储了由调制射束将要在衬底上形成的所需剂量的图案的压缩表示的压缩图案存储器和至少部分地对压缩表示进行解压缩的辞典解压缩器。辞典解压缩器包含外部辞典存储器、第一辞典解码器和第二辞典解码器，所述第一辞典解码器通过从外部辞典存储器中提取与包含在压缩表示中的对外部辞典存储器的引用相对应的图案数据的若干部分至少部分地解压缩至少部分压缩表示，并且所述第二辞典解码器具有内部辞典存储器，第二辞典解码器通过从内部辞典存储器中提取与包含在压缩表示中的对内部辞典存储器的引用相对应的图案数据的若干部分至少部分地解压缩至少部分压缩表示。
摘要（英）：

A lithographic apparatus comprises an array of individually controllable elements that modulate a beam of radiation, a compressed-pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, and a dictionary decompressor that at least partially decompress the compressed representation. The dictionary decompressor comprises an external dictionary memory, a first dictionary decoder that at least partially decompress at least a part of the compressed representation by extracting, from the external dictionary memory, portions of pattern data corresponding to references to the external dictionary memory contained in the compressed representation, and a second dictionary decoder having an internal dictionary memory, the second dictionary decoder that at least partially decompress at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in compressed representation.

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