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实用新型
CN201270249Y 一种基于无机材料增强紫外响应的硅基成像器件 失效 - 权利终止

一种基于无机材料增强紫外响应的硅基成像器件
摘要：
一种基于无机材料增强紫外响应的硅基成像器件，其特征在于：在光电器件光敏面基片的光入射面镀一层可将紫外辐射转换为可见光的Zn2SiO4:Mn膜层；与硅基成像器件光敏面基片致密结合。该膜层将紫外光转化为可见光；所述的Zn2SiO4:Mn膜层，Zn2SiO4和Mn的质量比为Zn2SiO4∶Mn＝100∶2.4。本实用新型所制备的硅基成像器件紫外响应无机薄膜具有较好的转化效率，其发射峰值波长为525nm，恰好在CCD等探测器的最敏感响应波段；无机变频薄膜克服了随时间衰减老化的问题，能够有效增强硅基成像器件对紫外光的敏感度。
摘要（英）：

A silicon-based imaging device based on the reinforced ultraviolet response of inorganic material is characterized in that the light incident face of the photosensitive face substrate of a photoelectric device is plated with one Zn2SiO4: Mn membrane for converting ultraviolet radiation into visible light, and the membrane is tightly combined with the photosensitive face substrate of the silicon-based imaging device. The membrane converts ultraviolet light into visible light. The mass ratio between Zn2SiO4 and Mn of the Zn2SiO4: Mn membrane is 100: 2.4. The ultraviolet response inorganic membrane of silicon-based imaging device has high transfer efficiency, whose emission peak wavelength is 525nm at the wavelength band of highest sensitivity of the CCD detectors and the like. The inorganic variable-frequency membrane overcomes the attenuation aging problem along time, and can effectively improve the sensitivity of silicon-based imaging device on ultraviolet light.

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