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实用新型
CN203781854U 一种硅片母合金的生产装置 失效 - 权利终止

一种硅片母合金的生产装置
摘要：
本实用新型公开了一种硅片母合金的生产装置，包括：氯硅烷原料配料罐、氢气原料配料罐、金属杂质吸附柱、母合金掺杂剂储罐、反应炉，母合金掺杂剂储罐与氯硅烷原料配料罐的入口或氢气原料配料罐的入口连接，氯硅烷原料配料罐的出口与金属杂质吸附柱的入口连接，金属杂质吸附柱的出口与反应炉的入口连接，氢气原料配料罐的出口与反应炉的入口连接。该装置通过金属杂质吸附柱有效去除了制备过程中的金属杂质，使用本装置进行制备的过程就是在现有技术中的由氯硅烷通过还原反应制备多晶硅的生产过程中的反应原料氯硅烷中加入掺杂相应的第IIIA族元素的三氯化物、第IIIA族元素的氢化物、第VA族元素的三氯化物、第VA族元素氢化物中的一种。
摘要（英）：

The utility model discloses a device for producing master silicon alloy. The device comprises a chlorosilane material distribution tank, a hydrogen material distribution tank, a metal impurity adsorption column, a master alloy dopant storage tank and a reaction furnace, wherein the master alloy dopant storage tank is connected with an inlet of the chlorosilane material distribution tank and the inlet of the hydrogen material distribution tank; the outlet of the chlorosilane material distribution tank is connected with the inlet of the metal impurity adsorption column; the outlet of the metal impurity adsorption column is connected with the inlet of the reaction furnace; and the outlet of the hydrogen material distribution tank is connected with the inlet of the reaction furnace. Metal impurities in the preparation process are effectively removed by virtue of the metal impurity adsorption column, the preparation process using the device is to add and dope one kind of corresponding trichlorides of IIIA-group elements, hydrides of IIIA-group elements, trichlorides of VA-group elements and hydrides of VA-group elements to the reaction material chlorosilane in the production process of preparing polycrystalline silicon from chlorosilane by reduction reaction in the prior art.

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