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实用新型
CN206076275U 镓元素均匀分布的铜铟镓硒薄膜吸收层制备装置 失效 - 权利终止

镓元素均匀分布的铜铟镓硒薄膜吸收层制备装置
摘要：
本实用新型公开了镓元素均匀分布的铜铟镓硒薄膜吸收层制备装置。装置包括位于硒化炉腔内的样品托架、样品加热台、分流板、坩埚、坩埚加热器和硒颗粒；铜铟镓合金预制层样品的两端放置在样品托架上，样品加热台位于铜铟镓合金预制层样品上方，样品托架下方设有坩埚和坩埚加热器，坩埚内装有所述硒颗粒，坩埚上方开口设有供硒蒸汽穿过的分流板，分流板位于铜铟镓合金预制层样品下方；硒化炉腔的一侧壁设有抽气系统，与抽气系统相对的硒化炉腔另一侧壁设有进气系统。本实用新型制备的铜铟镓硒薄膜其成分中各元素特别是镓元素分布均匀；制备的铜铟镓硒薄膜太阳能电池转换效率大大提高。
摘要（英）：

The utility model discloses a gallium element evenly distributed's copper indium gallium selenium film absorbed layer preparation facilities. The device is including the sample holder frame, sample warm table, flow distribution plate, crucible, crucible heater and the selenium granule that are located the selenylation furnace chamber, place on the sample holder frame at the both ends of copper indium gallium alloy prefabricated layer sample, and the sample warm table lies in copper indium gallium alloy prefabricated layer sample top, and sample holder frame below is equipped with crucible and crucible heater, is equipped with in the crucible the selenium granule, crucible top opening is equipped with the flow distribution plate that supplies selenium steam to pass, and the flow distribution plate is located copper indium gallium alloy prefabricated layer sample below, a lateral wall of selenylation furnace chamber is equipped with air -bleed system, and selenylation furnace chamber another lateral wall relative with air -bleed system is equipped with air intake system. The utility model discloses especially gallium distribution of element is even for each element in its composition of copper indium gallium selenium film of preparation, the copper indium gallium selenium thin -film solar cell conversion efficiency of preparation improves greatly.

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