The utility model discloses a single micro -nano structure transfer device. The utility model discloses a transfer device includes: the microscope, a little receive the executor mount, a little receive the executor, shift probe and micro -nano structure transfer substrate, micro -nano structure transfer substrate has periodic protruding platform and a coordinate mark, controls through microscope in situ observation and normal position and receives the executor a little, realizes that single micro -nano structure's accuracy position shifts, can accomplish the preliminary sign analysis to micro -nano structure on micro -nano structure transfer substrate, and under microscopical normal position is observed, seek a list micro -nano structure who treats the transfer through coordinate mark normal position to lifting it from micro -nano structure transfer substrate and taking out through receiving the transfer probe of executor a little, the accurate assigned position that shifts to target substrate on shifts positioning accuracy and can be superior to 1 micron again, adopt the principle of electrostatic absorption, under the clear circumstances of tip probe of guaranteeing the transfer probe, can not introduce not clear impurity in the transfer process.