发明公开
- 专利标题: Improvements in or relating to the processing of radiation sensitive devices
- 专利标题(中): 辐射敏感器件的处理或相关的改进
-
申请号: EP83306230申请日: 1983-10-14
-
公开(公告)号: EP0107454A3公开(公告)日: 1986-03-12
- 发明人: Lawson, Leslie Edward , Ingham, Michael
- 申请人: VICKERS PLC
- 专利权人: VICKERS PLC
- 当前专利权人: VICKERS PLC
- 优先权: GB8230105 19821021
- 主分类号: G03F07/26
- IPC分类号: G03F07/26
摘要:
Changes occurring in the electrical conductivity of liquids used to process image-wise exposed radiation sensitive devices are used as a measure of the deterioration in effectiveness of the liquids. This deterioration is compensated for by varying the processing conditions, such as temperature, time, scrubbing action and processing liquid composition, in accordance with the change in conductivity.
信息查询