发明公开
EP0107454A3 Improvements in or relating to the processing of radiation sensitive devices 失效
辐射敏感器件的处理或相关的改进

  • 专利标题: Improvements in or relating to the processing of radiation sensitive devices
  • 专利标题(中): 辐射敏感器件的处理或相关的改进
  • 申请号: EP83306230
    申请日: 1983-10-14
  • 公开(公告)号: EP0107454A3
    公开(公告)日: 1986-03-12
  • 发明人: Lawson, Leslie EdwardIngham, Michael
  • 申请人: VICKERS PLC
  • 专利权人: VICKERS PLC
  • 当前专利权人: VICKERS PLC
  • 优先权: GB8230105 19821021
  • 主分类号: G03F07/26
  • IPC分类号: G03F07/26
Improvements in or relating to the processing of radiation sensitive devices
摘要:
Changes occurring in the electrical conductivity of liquids used to process image-wise exposed radiation sensitive devices are used as a measure of the deterioration in effectiveness of the liquids. This deterioration is compensated for by varying the processing conditions, such as temperature, time, scrubbing action and processing liquid composition, in accordance with the change in conductivity.
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