发明公开
EP0295708A3 Semiconductor device having a superconductive wiring 失效
具有超导线的半导体器件

  • 专利标题: Semiconductor device having a superconductive wiring
  • 专利标题(中): 具有超导线的半导体器件
  • 申请号: EP88109700.0
    申请日: 1988-06-16
  • 公开(公告)号: EP0295708A3
    公开(公告)日: 1989-09-06
  • 发明人: Taguchi, Masao
  • 申请人: FUJITSU LIMITED
  • 申请人地址: 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi, Kanagawa 211 JP
  • 专利权人: FUJITSU LIMITED
  • 当前专利权人: FUJITSU LIMITED
  • 当前专利权人地址: 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi, Kanagawa 211 JP
  • 代理机构: Schmidt-Evers, Jürgen, Dipl.-Ing.
  • 优先权: JP150248/87 19870618
  • 主分类号: H01L23/52
  • IPC分类号: H01L23/52 H01L21/90 H01L39/24
Semiconductor device having a superconductive wiring
摘要:
On a IC where the wiring layer (21) is formed of supercon­ductive material, an electrode (23) formed of normal metals, i. e. non-superconductive metals, such as aluminum, connects a part of semiconductor region (4) via a barrier metal, such as TiN, to the superconductive layer (21) wiring at least at the superconductive layer (21) wiring's side wall which is essentially orthogonal to the layer wiring. Accordingly, even when the wiring layer (21) is anisotro­pically superconductive mainly in direction parallel to the plane of the deposition, the superconductive property is fully enjoyed while the copper atoms in the supercon­ductive material and the silicon atoms in the semiconductor region (4) of the IC do not produce undesirable alloy, resulting in improved reliability of the IC operation, i. e. the semiconductor material as well as the supercon­ductive material is not deteriorated.
公开/授权文献
信息查询
0/0