发明公开
- 专利标题: Semiconductor device having a superconductive wiring
- 专利标题(中): 具有超导线的半导体器件
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申请号: EP88109700.0申请日: 1988-06-16
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公开(公告)号: EP0295708A3公开(公告)日: 1989-09-06
- 发明人: Taguchi, Masao
- 申请人: FUJITSU LIMITED
- 申请人地址: 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi, Kanagawa 211 JP
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: 1015, Kamikodanaka, Nakahara-ku Kawasaki-shi, Kanagawa 211 JP
- 代理机构: Schmidt-Evers, Jürgen, Dipl.-Ing.
- 优先权: JP150248/87 19870618
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L21/90 ; H01L39/24
摘要:
On a IC where the wiring layer (21) is formed of superconductive material, an electrode (23) formed of normal metals, i. e. non-superconductive metals, such as aluminum, connects a part of semiconductor region (4) via a barrier metal, such as TiN, to the superconductive layer (21) wiring at least at the superconductive layer (21) wiring's side wall which is essentially orthogonal to the layer wiring. Accordingly, even when the wiring layer (21) is anisotropically superconductive mainly in direction parallel to the plane of the deposition, the superconductive property is fully enjoyed while the copper atoms in the superconductive material and the silicon atoms in the semiconductor region (4) of the IC do not produce undesirable alloy, resulting in improved reliability of the IC operation, i. e. the semiconductor material as well as the superconductive material is not deteriorated.
公开/授权文献
- EP0295708B1 Semiconductor device having a superconductive wiring 公开/授权日:1994-02-23
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