发明公开
EP0410067A1 Integrated semiconductor diode laser and photodiode structure
失效
Integrierte Halbleiterdiodenlaser und Photodiodenstruktur。
- 专利标题: Integrated semiconductor diode laser and photodiode structure
- 专利标题(中): Integrierte Halbleiterdiodenlaser und Photodiodenstruktur。
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申请号: EP89810577.0申请日: 1989-07-27
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公开(公告)号: EP0410067A1公开(公告)日: 1991-01-30
- 发明人: Buchmann, Peter Leo, Dr. , Harder, Christoph Stephan, Dr. , Voegeli, Otto, Dr.
- 申请人: International Business Machines Corporation
- 申请人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 代理机构: Barth, Carl Otto
- 主分类号: H01L33/00
- IPC分类号: H01L33/00 ; H01S3/025
摘要:
Integrated semiconductor structure with optically coupled laser diode (11) and photodiode (12A), both devices having etched, vertical facets (16A, 21). The photodiode has a spatially non-uniform sensitivity profile with respect to the incident light beam (18A) emitted by the laser. This is due to the varying distance from the laser facet and/or to variations in the angle of incidence and results in photocurrents produced by the photodiode that depend on the intensity distribution of the light beam. The spatially non-uniform sensitivity profile allows the measurement of the far-field intensity distribution of the laser and thus on-wafer screening of lasers with respect to their mode-stability.
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