发明公开
EP0452041A1 Substrate conveying device and method of controlling the same
失效
TransportvorrichtungfürSubstrate und Verfahren zur Kontrolle。
- 专利标题： Substrate conveying device and method of controlling the same
- 专利标题（中）： TransportvorrichtungfürSubstrate und Verfahren zur Kontrolle。
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申请号： EP91302986.4申请日： 1991-04-04
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公开(公告)号： EP0452041A1公开(公告)日： 1991-10-16
- 发明人: Kuno, Mitsutoshi , Fujioka, Hidehiko , Mizusawa, Nobutoshi , Chiba, Yuji , Kariya, Takao , Uda, Koji , Uzawa, Shunichi , Kawakami, Eigo
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 代理机构： Beresford, Keith Denis Lewis
- 优先权： JP90413/90 19900406; JP141565/90 19900601; JP174441/90 19900703
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; G03F7/20
摘要：
A method of controlling a conveying device having a gripping hand for gripping an article to be conveyed and a conveying mechanism for conveying the gripping hand, wherein a pressing force applied to the gripping hand through the article being conveyed is detected and the conveying operation of the conveying mechanism is stopped when the pressing force exceeds a predetermined. limit.
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