摘要:
A method of controlling a conveying device having a gripping hand for gripping an article to be conveyed and a conveying mechanism for conveying the gripping hand, wherein a pressing force applied to the gripping hand through the article being conveyed is detected and the conveying operation of the conveying mechanism is stopped when the pressing force exceeds a predetermined. limit.
摘要:
An ink-jet recording apparatus comprises recording means (1) for recording an image on a recording medium; image reader means (2) for reading the image; cmparing means (3) for comparing a recording signal input from the recording means (1) and an image signal input from the image reader means (2); determination means (4) for diagnosing an ink injection state of a recording head nozzle and determining an ink injection recovery processing method on the basis of the comparison result of the comparing means (3); and processing means (5) for performing ink injection recovery processing based on the determination result of the determination means (4).
摘要:
A holding mechanism comprises a box body (10,20) for providing a space for accommodating an original (E), an opening (22) formed in a side portion of the box body, for inserting the original into the space, and holding means (11a-c,21a-c) for holding the original within the space by a kinematic mount system. An exposure apparatus can use the holding mechanism.
摘要:
A method and apparatus for manufacturing an X-ray mask having a mask substrate and a supporting frame, wherein the mask substrate having a first surface on which a mask pattern is provided or to be provided is to be fixed onto a first surface of the supporting frame by using an adhesive material, is disclosed. A first base has a first engaging surface to be opposed to and engageable with the first surface of the mask substrate and a second base has a second engaging surface to be opposed to and engageable with a second surface of the supporting frame on a side thereof remote from the first surface thereof. Attracting device is actable on the first and second bases to attract the mask substrate to the first base and to attract the supporting frame to the second base, respectively, whereby the mask substrate and the supporting frame are held fixed by the first and second bases, respectively. Interval adjusting device relatively moves at least one of the first and second bases to the other with the mask substrate and the supporting frame being held by the first and second bases, respectively, wherein at an adjusted interval the first engaging surface of the first base and the second engaging surface of the second base are held in parallel to each other.
摘要:
A method and apparatus for manufacturing an X-ray mask having a mask substrate and a supporting frame, wherein the mask substrate having a first surface on which a mask pattern is provided or to be provided is to be fixed onto a first surface of the supporting frame by using an adhesive material, is disclosed. A first base has a first engaging surface to be opposed to and engageable with the first surface of the mask substrate and a second base has a second engaging surface to be opposed to and engageable with a second surface of the supporting frame on a side thereof remote from the first surface thereof. Attracting device is actable on the first and second bases to attract the mask substrate to the first base and to attract the supporting frame to the second base, respectively, whereby the mask substrate and the supporting frame are held fixed by the first and second bases, respectively. Interval adjusting device relatively moves at least one of the first and second bases to the other with the mask substrate and the supporting frame being held by the first and second bases, respectively, wherein at an adjusted interval the first engaging surface of the first base and the second engaging surface of the second base are held in parallel to each other.