发明公开
- 专利标题: Semiconductor device and method for producing the same
- 专利标题(中): 半导体器件及其制造方法
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申请号: EP91304831.0申请日: 1991-05-29
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公开(公告)号: EP0459773A3公开(公告)日: 1992-06-03
- 发明人: Yuzurihara, Hiroshi, c/o Canon Kabushiki Kaisha , Inoue, Shunsuke, c/o Canon Kabushiki Kaisha , Miyawaki, Mamoru, c/o Canon Kabushiki Kaisha , Matsumoto, Shigeyuki, c/o Canon Kabushiki Kaisha
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 代理机构: Beresford, Keith Denis Lewis
- 优先权: JP139612/90 19900531
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L23/522
摘要:
A semiconductor device comprising a laminate structure of a first portion (103) principally composed of a component same as the principal component of the semiconductor layers (101), and a second portion consisting of a metal (104). PMOS device (P1) and NMOS device (N1) are formed on a semiconductor substrate (101) to constitute a CMOS circuit. On an oxide film (102) is formed a laminate electrode wiring structure consisting of a single semiconductor layer (103) and a metal layer (104), serving as gate electrodes and wirings for both devices. Said semiconductor layer (103) is doped in p-type in a portion 103A at the side of the PMOS device, and in n-type in a portion 103B at the side of the NNOS device on the entire area of the semiconductor layer (103) (e.g. polysilicon), there is deposited selectively a metal layer 104 composed of Al or principally of Al, or of another metal such Cu, Mo or W.
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