发明公开
- 专利标题: Crystal diameter measuring device
- 专利标题(中): 水晶直径测量装置
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申请号: EP91112379.2申请日: 1991-07-24
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公开(公告)号: EP0472907A3公开(公告)日: 1993-01-20
- 发明人: Baba, Masahiko , Ibe, Hiroyuki
- 申请人: SHIN-ETSU HANDOTAI COMPANY LIMITED
- 申请人地址: 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo JP
- 专利权人: SHIN-ETSU HANDOTAI COMPANY LIMITED
- 当前专利权人: SHIN-ETSU HANDOTAI COMPANY LIMITED
- 当前专利权人地址: 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo JP
- 代理机构: Rau, Manfred, Dr. Dipl.-Ing.
- 优先权: JP199674/90 19900728
- 主分类号: G01B11/10
- IPC分类号: G01B11/10 ; C30B15/26
摘要:
A device for measuring the diameter of the growing portions of the single crystals grown by the Czochalski technique is provided. This device is capable of measuring the crystal diameter with a high degree of accuracy over a wide range from the small-diameter portion thereof to the large diameter portion. A one-dimensional camera 28 and a two-dimensional camera 48 are fixed to a shoulder chamber 34 in such a manner that the optical axes thereof are parallel to each other. An optical path switch-over device, consisting of a cylinder 56, a movable plane mirror 52 mounted on a cylinder rod, and a fixed plane mirror 54, is provided. When the diameter of a neck portion of the single crystal 20 having a diameter of 10 mm or less is measured, the light reflected by the plane mirrors 52 and 54 is made incident on the two-dimensional camera 48, and the diameter of a bright ring 27 is measured on the basis of the image obtained by the two-dimensional camera. To measure the diameter of the conical and cylindrical portions 24 and 26 having a diameter of 10 mm or more, an image of a line lying across the bright ring 27 is obtained by the one-dimensional camera 28 by retracting the plane mirror 52, and the diameter of the bright ring 27 is measured on the basis of the position where this line crosses the bright ring. When the two-dimensional camera 48 is switched over to the one-dimensional camera 28, the diameter measured using the one-dimensional camera 28 is corrected such that it coincides with the diameter measured using the two-dimensional camera 48.
公开/授权文献
- EP0472907B1 Crystal diameter measuring device 公开/授权日:1995-09-20
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