发明公开
- 专利标题: METHOD OF CLEANING
- 专利标题(中): Verfahren und Vorrichtung zum Reinigen。
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申请号: EP91906198.6申请日: 1991-03-15
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公开(公告)号: EP0473795A1公开(公告)日: 1992-03-11
- 发明人: INADA, Minoru , KABUKI, Kimiaki , IMAJO, Yasutaka , YAGI, Noriaki , SAITOH, Nobuhiro
- 申请人: KABUSHIKI KAISHA TOSHIBA , JAPAN FIELD COMPANY, LTD.
- 申请人地址: 72, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa-ken 210 JP
- 专利权人: KABUSHIKI KAISHA TOSHIBA,JAPAN FIELD COMPANY, LTD.
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA,JAPAN FIELD COMPANY, LTD.
- 当前专利权人地址: 72, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa-ken 210 JP
- 代理机构: Freed, Arthur Woolf
- 优先权: JP65837/90 19900316
- 国际公布: WO9113697 19910919
- 主分类号: B08B3/08
- IPC分类号: B08B3/08 ; B01D12/00 ; C11D7/50 ; C11D10/02 ; H01L21/304
摘要:
A cleaning method which comprises cleaning an object with a detergent prepared by compounding a basic detergent such as an organosilicon detergent or an isoparaffinic detergent with a detergency improver such as a surfactant or a hydrophilic solvent, rinsing the cleaned object with the basic detergent, and drying it with warm air or steam. Since the basic detergent can be recovered for reuse, the economic advantage of the use of a plurality of detergents is enhanced. Since the detergent comprises an organosilicon or isoparaffinic detergent and additives such as a surfactant or a hydrophilic solvent, it has degreasing and draining properties comparable to those of chlorofluorocarbon detergents and is harmless from the aspect of environmental pollution.
公开/授权文献
- EP0473795B1 METHOD OF CLEANING 公开/授权日:1997-06-25
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