发明公开
- 专利标题: METHOD OF OBTAINING ACCURATE COMPOSITIONAL INFORMATION OF MULTILAYER COMPOSITIONS
- 专利标题(中): 获得多层组合物精确组成信息的方法
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申请号: EP90910998申请日: 1990-06-22
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公开(公告)号: EP0478690A4公开(公告)日: 1992-09-02
- 发明人: VIDRINE, WARREN, D.
- 申请人: MEASUREX CORPORATION
- 申请人地址: ONE RESULTS WAY; CUPERTINO, CALIFORNIA 95014
- 专利权人: MEASUREX CORPORATION
- 当前专利权人: MEASUREX CORPORATION
- 当前专利权人地址: ONE RESULTS WAY; CUPERTINO, CALIFORNIA 95014
- 优先权: US37042089 1989-06-22
- 主分类号: G01B15/02
- IPC分类号: G01B15/02 ; G01N9/24 ; G01N21/35 ; G01N23/08 ; G01Q90/00 ; G01N23/06
摘要:
The present invention relates to a method, or process, for deriving compositional information from a multi-layer composition which includes the steps of obtaining multi-layer fractional composition information using a non-contact gauge such as an FTIR gauge; obtaining additional multi-layer composition information using a beta gauge; and, correcting for beta ray absorption differences among the layers of the multi-layer composition by combining the multi-layer fractional composition information with the additional multi-layer composition information obtained using the beta gauge.
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