发明授权
- 专利标题： SOG WITH MOISTURE RESISTANT PROTECTIVE CAPPING LAYER
- 专利标题（中）： 用水分被覆保护涂层SOG。
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申请号： EP91909904.4申请日： 1991-05-28
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公开(公告)号： EP0532543B1公开(公告)日： 1995-03-01
- 发明人: OUELLET, Luc
- 申请人： MITEL CORPORATION
- 申请人地址： 350 Legget Drive, P.O. Box 13089 Kanata Ontario K2K 1X3 CA
- 专利权人： MITEL CORPORATION
- 当前专利权人： MITEL CORPORATION
- 当前专利权人地址： 350 Legget Drive, P.O. Box 13089 Kanata Ontario K2K 1X3 CA
- 代理机构： Copp, David Christopher
- 优先权： CA2017720 19900529
- 国际公布： WO9119317 19911212
- 主分类号： H01L21/316
- IPC分类号： H01L21/316 ; H01L21/768
摘要：
A method of applying spin-on glass (SOG) on a substrate over low-melting point, non-refractory materials such as aluminium (1a, 1b) is disclosed. In the method a layer of applied spin-on glass (4) is subjected to disconnection and outgassing of water and reaction by-products, and then capped with a protective dielectric layer resistant to moisture diffusion (5).
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