发明公开
EP0630087A2 Apparatus for allowing web-like material to be subjected to vacuum glow-discharging treatment and method of conducting vacuum glow-discharging treatment 失效
装置用于与真空辉光放电处理的片状材料和制造真空辉光放电的方法。

Apparatus for allowing web-like material to be subjected to vacuum glow-discharging treatment and method of conducting vacuum glow-discharging treatment
摘要:
An apparatus for allowing the opposite surfaces of a band-shaped or web-like material to be subjected to vacuum glow-discharging treatment includes a vacuum housing in which two rows of electrodes are arranged with the band-shaped material interposed therebetween, and an elongated annular hollow space serving as a coolant flow path is formed in each electrode. A coolant supplying pipe for supplying a coolant through the elongated annular hollow space and a coolant discharging pipe for discharging the coolant from the elongated annular hollow space are connected to the electrode. Stable electricity discharging treatment can be conducted for a long time without any occurrence of abnormal electricity discharging by preventing the temperature of each electrode from being excessively elevated.
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