发明公开
- 专利标题: Apparatus for allowing web-like material to be subjected to vacuum glow-discharging treatment and method of conducting vacuum glow-discharging treatment
- 专利标题(中): 装置用于与真空辉光放电处理的片状材料和制造真空辉光放电的方法。
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申请号: EP94109188.6申请日: 1994-06-15
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公开(公告)号: EP0630087A2公开(公告)日: 1994-12-21
- 发明人: Tamaki, Hiroyuki , Tatsuta, Sumitaka
- 申请人: FUJI PHOTO FILM CO., LTD.
- 申请人地址: 210 Nakanuma Minami Ashigara-shi Kanagawa JP
- 专利权人: FUJI PHOTO FILM CO., LTD.
- 当前专利权人: FUJI PHOTO FILM CO., LTD.
- 当前专利权人地址: 210 Nakanuma Minami Ashigara-shi Kanagawa JP
- 代理机构: Grünecker, Kinkeldey, Stockmair & Schwanhäusser Anwaltssozietät
- 优先权: JP147864/93 19930618
- 主分类号: H01T19/00
- IPC分类号: H01T19/00 ; B29C59/10 ; B29C59/14 ; G03C1/91
摘要:
An apparatus for allowing the opposite surfaces of a band-shaped or web-like material to be subjected to vacuum glow-discharging treatment includes a vacuum housing in which two rows of electrodes are arranged with the band-shaped material interposed therebetween, and an elongated annular hollow space serving as a coolant flow path is formed in each electrode. A coolant supplying pipe for supplying a coolant through the elongated annular hollow space and a coolant discharging pipe for discharging the coolant from the elongated annular hollow space are connected to the electrode. Stable electricity discharging treatment can be conducted for a long time without any occurrence of abnormal electricity discharging by preventing the temperature of each electrode from being excessively elevated.
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