发明公开
- 专利标题: IMPROVED POLISHING PADS AND METHODS FOR THEIR USE
- 专利标题(中): 改进的抛光坐垫和使用它的方法
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申请号: EP95915502.0申请日: 1995-03-30
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公开(公告)号: EP0701499A1公开(公告)日: 1996-03-20
- 发明人: COOK, Lee, Melbourne , ROBERTS, John, V., H. , JENKINS, Charles, William , PILLAI, Raj, Raghav
- 申请人: RODEL, INC.
- 申请人地址: 451 Bellevue Road Newark Delaware 19713 US
- 专利权人: RODEL, INC.
- 当前专利权人: RODEL, INC.
- 当前专利权人地址: 451 Bellevue Road Newark Delaware 19713 US
- 代理机构: Petersen, Frank
- 优先权: US19940224768 19940408
- 国际公布: WO1995027595 19951019
- 主分类号: B24B37
- IPC分类号: B24B37 ; A47L13 ; B24D3 ; B24D11 ; B24D13 ; H01L21
摘要:
An improved polishing pad is provided comprising a solid uniform polymer sheet having no intrinsic ability to absorb or transport slurry particles having during use a surface texture or pattern which has both large and small flow channels present simultaneously which permit the transport of slurry across the surface of the polishing pad, where said channels are not part of the material structure but are mechanically produced upon the pad surface. In a preferred version of the invention, the pad texture consists of a macrotexture produced prior to use and a microtexture which is produced by abrasion by a multiplicity of small abrasive points at a regular selected interval during the use of the pad.
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