发明授权
- 专利标题： VERFAHREN UND EINRICHTUNG ZUM PLASMAAKTIVIERTEN BEDAMPFEN
- 专利标题（英）： Plasma-activated vapour-deposition process and device
- 专利标题（中）： 方法和设备等离子体活化蒸镀
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申请号： EP95901341.8申请日： 1994-11-22
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公开(公告)号： EP0734459B1公开(公告)日： 1999-02-03
- 发明人: KIRCHHOFF, Volker , GOEDICKE, Klaus , NEUMANN, Manfred , RESCHKE, Jonathan , SCHILLER, Siegfried
- 申请人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 申请人地址： Leonrodstrasse 54 80636 München DE
- 专利权人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人： FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- 当前专利权人地址： Leonrodstrasse 54 80636 München DE
- 优先权： DE4343042 19931216
- 国际公布： WO9516798 19950622
- 主分类号： C23C14/08
- IPC分类号： C23C14/08 ; C23C14/32 ; C23C14/35 ; H01J37/32 ; H01J37/34
摘要：
The object of the invention is to achieve a high and stable deposition rate over a long period of time in order to apply preferably reactive layers of electrically insulating compounds. Reactivity, energetic activation and layer composition and structure should be regulated and kept constant by acting on the plasma density. For that purpose, vapour propagates from the vaporiser (1) through a plasma produced between electrodes (1, 1') and interacts therewith. The electrodes are made of a material to be vaporised or of a component and/or doting material of the layer to be applied. The plasma is maintained in the vapour of the material to be vaporised and/or in an inert gas. This process is suitable for improving the surface of semi-finished products and assembly units, in particular for applying oxide layers with barrier effect on plastic foils in the packaging industry.
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